한국소성가공학회:학술대회논문집 (Proceedings of the Korean Society for Technology of Plasticity Conference)
- 한국소성가공학회 2005년도 춘계학술대회 논문집
- /
- Pages.60-63
- /
- 2005
패턴드 미디어를 위한 나노 사출 성형 공정에 관한 연구
Replication of Patterned Media Using Nano-injection Molding Process
- 발행 : 2005.05.01
초록
In this paper, we investigated the possibility of replicating patterned media by nano-injection molding process with a metallic nano-stamper. The original nano-master was fabricated by E-beam lithography and ICP etching process. The metallic nano-stamper was fabricated using a nanoimprint lithography and nano-electroforming process. Finally, the nano-patterned substrate was replicated using a nano-injection molding process without additional etching process. The replicated patterns using nano-injection molding process were as small as 50 nm in diameter, 150 nm in pitch, and 50 nm in depth.