대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2005년도 제36회 하계학술대회 논문집 C
- /
- Pages.2418-2420
- /
- 2005
유도결합형 제논 플라즈마의 전자온도, 전자밀도 특성
Properties of Electron Temperature and Electron Density in Inductively Coupled Xenon Plasma
- Her, In-Sung (Wonkwang Univ.) ;
- Choi, Gi-Seung (Wonkwang Univ.) ;
-
Lee, Jong-Chan
(Kumho Electric Inc.) ;
-
Park, Dae-Hee
(Wonkwang Univ.)
- 발행 : 2005.07.18
초록
In this paper, parameters of electron temperature and density for the mercury-free lighting-source were measured to diagnosis and analyze in Xe based inductively coupled plasma(ICP). In results at several dependences of
키워드