미세 액적 토출 시스템의 구동기 설계 및 특성에 관한 연구

A study on the design and characteristics of an actuator for micro droplet ejecting system

  • 발행 : 2005.07.18

초록

The design of a piezoelectric actuator for micro droplet ejecting system has bee studied. The actuator has been evaluated by using commercial FEM package and its displacement are measured by LDV(Laser Doppler Vibrometer). The characteristics of the actuator are evaluated with varation in a ratio of width of PZT to that of membrane and thickness ratio of PZT to membrane.

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