대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2005년도 제36회 하계학술대회 논문집 C
- /
- Pages.2153-2155
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- 2005
Focus Ring 재질과 두께변경에 따른 Rnit non uniformity 평가
Rnit non uniformity evaluation by materials and thickness of focus ring
- Cha, Sung-Ho (Hanyang University Electrical Engineering) ;
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Chung, Chin-Wook
(Hanyang University Electrical Engineering)
- 발행 : 2005.07.18