대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2005년도 제36회 하계학술대회 논문집 C
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- Pages.1992-1994
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- 2005
RF 마그네트론 스퍼터링에 의해 증착된 SMR 구조 FBAR 소자의 Bragg 반사층의 미세구조 특성에 관한 연구
Micro structural characteristics of Bragg reflector of SMR type FBAR device deposited by RF magnetron sputtering
- Park, Sung-Hyun (Department of Electric and Electronics Engineering in Kyungwon University) ;
- Lee, Sun-Beom (Department of Electric and Electronics Engineering in Kyungwon University) ;
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Lee, Neung-Heon
(Department of Electric and Electronics Engineering in Kyungwon University) ;
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Shin, Young-Hwa
(Department of Electric and Electronics Engineering in Kyungwon University)
- 발행 : 2005.07.18
초록
In this study, Bragg reflector was formed as tungsten(W) and
키워드