Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2005.07c
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- Pages.1992-1994
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- 2005
Micro structural characteristics of Bragg reflector of SMR type FBAR device deposited by RF magnetron sputtering
RF 마그네트론 스퍼터링에 의해 증착된 SMR 구조 FBAR 소자의 Bragg 반사층의 미세구조 특성에 관한 연구
- Park, Sung-Hyun (Department of Electric and Electronics Engineering in Kyungwon University) ;
- Lee, Sun-Beom (Department of Electric and Electronics Engineering in Kyungwon University) ;
- Lee, Neung-Heon (Department of Electric and Electronics Engineering in Kyungwon University) ;
- Shin, Young-Hwa (Department of Electric and Electronics Engineering in Kyungwon University)
- Published : 2005.07.18
Abstract
In this study, Bragg reflector was formed as tungsten(W) and
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