Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2005.07c
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- Pages.1971-1973
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- 2005
Development of process technique of the alumina membrane with nano-sized pore array
나노미터 크기의 미세구조물을 제작하기 위한 공정기술 개발
- Lee, J.H. (Division of Information Technology Engineering, Soonchenhyang University) ;
- Lee, B.W. (Division of Information Technology Engineering, Soonchenhyang University) ;
- Kim, C.K. (Division of Information Technology Engineering, Soonchenhyang University) ;
- Lee, K.H. (Department of materials Engineering, Soonchenhyang University)
- Published : 2005.07.18
Abstract
We fabricated an alumina membrane with nano-sized pore array by anodic oxidation using the thin film aluminum deposited on silicon wafer. It is important that the sample prepared by metal deposition method has a flat aluminum surface and a good adhesion between the silicon wafer and the thin film aluminum. The oxidation time was controlled by observation of current variation. The nano-sized pores with diameter of
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