대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2005년도 제36회 하계학술대회 논문집 C
- /
- Pages.1859-1861
- /
- 2005
투입전류 변화에 따라 실온 제작한 AZO 박막의 특성
Properties of AZO thin film with sputtering current at room temperature
- Kim, Kyung-Hwan (Kyungwon University) ;
- Cho, Bum-Jin (Kyungwon University) ;
- Keum, Min-Jong (Kyungwon University) ;
- Son, In-Hwan (Shinsung College)
- 발행 : 2005.07.18
초록
The ZnO:Al thin films were prepared on glass by Facing Target Sputtering (FTS) system. We investigated electrical, optical, and structural properties of AZO thin film with sputtering current
키워드