대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2005년도 제36회 하계학술대회 논문집 D
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- Pages.2809-2811
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- 2005
전자기 액츄애이터를 이용한 능동 진동제어시스템
Active Vibration Control System Using Electromagnet Actuator
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이주훈
(한국전기연구원 산업전기연구단) ;
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전정우
(한국전기연구원 산업전기연구단) ;
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황돈하
(한국전기연구원 산업전기연구단) ;
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강동식
(한국전기연구원 산업전기연구단) ;
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최영규
(부산대학교 전기공학과)
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Lee, Joo-Hoon
(Industry Applications Research Laboratory, KERI) ;
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Jeon, Jeong-Woo
(Industry Applications Research Laboratory, KERI) ;
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Hwang, Don-Ha
(Industry Applications Research Laboratory, KERI) ;
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Kang, Dong-Sik
(Industry Applications Research Laboratory, KERI) ;
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Choi, Young-Kiu
(Dept. of Electrical Engineering, Pusan National University)
- 발행 : 2005.07.18
초록
In this paper, we address an active vibration control system, which suppresses the vibration engaged by magnetically levitated stage. The stage system consists of a levitating platen with four permanent magnetic linear synchronous motors in parallel. Each motor generates vertical force for suspension against gravity and propulsion force horizontally as well. This stage can generate six degrees of freedom motion via the vertical and horizontal forces. In the stage system, which represents the settling-time critical system, the motion of the platen vibrates mechanically. We designed an active vibration control system for suppressing vibration due to the stage moving. The command feedforward with inertial feedback algorithm is used for solving stage system's critical problems. The components of the active vibration control system are accelerometers for detecting stage tables's vibrations, a digital controller with high precise signal converters, and electromagnetic actuators.
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