Positioning Control of Magnetic Levitation Stage Using Sliding Mode Controller

슬라이딩모드제어기를 적용한 자기부상 스태이지의 위치제어

In this paper, we address two position control scheme; the lead-lag control and the sliding mode control for a stage system, which is levitated and driven by electric magnetic actuators. This consists of a levitating object (called platen) with 4 permanent magnetic linear synchronous motors in parallel. Each motor generates vertical force for suspension against gravity and propulsion force horizontally as well. The sliding mode control algorithm is more effective than the lead-lag control algorithm to reduce effects from movements and disturbances of other axis.