대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2005년도 제36회 하계학술대회 논문집 D
- /
- Pages.2537-2539
- /
- 2005
정전용량 센서를 이용한 나노급 이송장치의 시스템 식별에 관한 연구
A Study on System Identification of Nano-scale Stage Using Capacitive Sensor
- Lee, Jea-Ho (School of Information and Communication Eng., SungKyunKwan University) ;
- Kim, Seung-Hyun (School of Information and Communication Eng., SungKyunKwan University) ;
-
Jung, Joon-Hong
(School of Information and Communication Eng., SungKyunKwan University) ;
-
Park, Ki-Heon
(School of Information and Communication Eng., SungKyunKwan University)
- 발행 : 2005.07.18
초록
In many cases the systems are so complex that it is not possible to obtain reasonable models using physical laws. Also a model based on physical laws contains a number of unknown parameters even if the structure is derived from physical laws. These problems can be solved by system identification. In this paper, a nano stage system is selected as an example for system identification. The transfer functions of this system is derived by using state-space model structure based on input/output data through experiment.
키워드