Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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A Study on System Identification of Nano-scale Stage Using Capacitive Sensor

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  • Lee, Jea-Ho (School of Information and Communication Eng., SungKyunKwan University) ;
  • Kim, Seung-Hyun (School of Information and Communication Eng., SungKyunKwan University) ;
  • Jung, Joon-Hong (School of Information and Communication Eng., SungKyunKwan University) ;
  • Park, Ki-Heon (School of Information and Communication Eng., SungKyunKwan University)
  • 이재호 (성균관대학교 정보통신공학부) ;
  • 김승현 (성균관대학교 정보통신공학부) ;
  • 정준홍 (성균관대학교 정보통신공학부) ;
  • 박기헌 (성균관대학교 정보통신공학부)
  • Published : 2005.07.18
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Abstract

In many cases the systems are so complex that it is not possible to obtain reasonable models using physical laws. Also a model based on physical laws contains a number of unknown parameters even if the structure is derived from physical laws. These problems can be solved by system identification. In this paper, a nano stage system is selected as an example for system identification. The transfer functions of this system is derived by using state-space model structure based on input/output data through experiment.

Keywords