Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2005.07d
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- Pages.2537-2539
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- 2005
A Study on System Identification of Nano-scale Stage Using Capacitive Sensor
정전용량 센서를 이용한 나노급 이송장치의 시스템 식별에 관한 연구
- Lee, Jea-Ho (School of Information and Communication Eng., SungKyunKwan University) ;
- Kim, Seung-Hyun (School of Information and Communication Eng., SungKyunKwan University) ;
- Jung, Joon-Hong (School of Information and Communication Eng., SungKyunKwan University) ;
- Park, Ki-Heon (School of Information and Communication Eng., SungKyunKwan University)
- Published : 2005.07.18
Abstract
In many cases the systems are so complex that it is not possible to obtain reasonable models using physical laws. Also a model based on physical laws contains a number of unknown parameters even if the structure is derived from physical laws. These problems can be solved by system identification. In this paper, a nano stage system is selected as an example for system identification. The transfer functions of this system is derived by using state-space model structure based on input/output data through experiment.
Keywords