한국공작기계학회:학술대회논문집 (Proceedings of the Korean Society of Machine Tool Engineers Conference)
- 한국공작기계학회 2005년도 춘계학술대회 논문집
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- Pages.424-428
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- 2005
Micro-Factory 공정간 마이크로 부품 검사 프로브 개발
Development of Optical Probe to Inspect Micron Scale Part in Micro-Factory
- 발행 : 2005.05.01
초록
This paper shows a non-contact optical method to inspect micron scale parts which will be manufactured in micro-factory system. This inspection system should have some characteristics like a small size, flexibility, and high measuring speed. In the viewpoint of measuring capabilities, it also has resolution under micron scale with measuring range over millimeter scale. Two methods will be presented in this paper, one is Moire and the other is white-light scanning interferometry. Also some experimental results will be presented to show the possibilities of the proposed inspection system.