단파장 위상천이를 이용한 미세형상 측정 I

The measurement for micro shape by Phase Shift method I

The development of Shadow Moire in many kinds of methods for acquiring 3-dimensional information from an object is written in this paper. The fringe is appeared, when a grating mask makes its shadow on the object. The object is moved along x-axis more then 3 times to get phases from its fringe that contains data of the object's height. PMP{Phase Measuring Profilometry) is used for analyzing these images from a CCD camera. The calculated phase is remedied for expending the restricted results due to range of the $tan^{-1}$.