Proceedings of the Korean Society of Machine Tool Engineers Conference (한국공작기계학회:학술대회논문집)
- 2005.05a
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- Pages.19-23
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- 2005
Development of a High Brightness Ion Beam Extraction System using Micro-size Aperture
마이크로 사이즈 인출구경을 이용한 고휘도 이온빔 인출 시스템 개발
- Published : 2005.05.01
Abstract
In order to develop a high brightness ion source using plasma, the ion beam extraction system with an aperture of