Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2004.08a
- /
- Pages.245-245
- /
- 2004
MOCVD and Characterization of ZnO Thin Films Using an Aminoalkoxide Single Precursor
- Kim, Ju-Yeon (Thin Films Materials Laboratory, Advanced Materials Division, Korea Research Institute of Chemical Technology) ;
- Kim, Min-Chan (Thin Films Materials Laboratory, Advanced Materials Division, Korea Research Institute of Chemical Technology) ;
-
Lee, Young-Kuk
(Thin Films Materials Laboratory, Advanced Materials Division, Korea Research Institute of Chemical Technology)
;
-
Chung, Taek-Mo
(Thin Films Materials Laboratory, Advanced Materials Division, Korea Research Institute of Chemical Technology)
;
- Kim, Chang-Gyoun ;
-
Kim, Yun-Soo
(Thin Films Materials Laboratory, Advanced Materials Division, Korea Research Institute of Chemical Technology)
- Published : 2004.08.19
Abstract
Keywords