한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2004년도 제27회 학술발표회 초록집
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- Pages.230-230
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- 2004
Silicon nitride cleaning by $F_2$ /Ar remote plasma processing
- Hwang, J.Y. (Dept. of Materials Science and Engineering and Center for Advanced Plasma Surface Technology Sungkyunkwan University) ;
- Kang, S.C. (Dept. of Materials Science and Engineering and Center for Advanced Plasma Surface Technology Sungkyunkwan University) ;
- Lee, N.E. (Dept. of Materials Science and Engineering and Center for Advanced Plasma Surface Technology Sungkyunkwan University) ;
- Joo, K.S. (Atto, Shinhwa Indus. Com.) ;
- Bae, G. (Atto, Shinhwa Indus. Com.)
- 발행 : 2004.08.19