Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2004.08a
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- Pages.230-230
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- 2004
Silicon nitride cleaning by $F_2$ /Ar remote plasma processing
- Hwang, J.Y. (Dept. of Materials Science and Engineering and Center for Advanced Plasma Surface Technology Sungkyunkwan University) ;
- Kang, S.C. (Dept. of Materials Science and Engineering and Center for Advanced Plasma Surface Technology Sungkyunkwan University) ;
- Lee, N.E. (Dept. of Materials Science and Engineering and Center for Advanced Plasma Surface Technology Sungkyunkwan University) ;
- Joo, K.S. (Atto, Shinhwa Indus. Com.) ;
- Bae, G. (Atto, Shinhwa Indus. Com.)
- Published : 2004.08.19
Abstract
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