Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

The Korean Vacuum Society (한국진공학회)
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Control of plasma parameters and negative ion density with modified capacitive discharge

  • Yu, Sin-Jae (Dept. of Physics, Korea Advanced Institute of Science and Technology (KAIST)) ;
  • Chae, Su-Hang (Dept. of Physics, Korea Advanced Institute of Science and Technology (KAIST)) ;
  • Jang, Hong-Yeong (Dept. of Physics, Korea Advanced Institute of Science and Technology (KAIST))
  • Published : 2004.08.19
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