Characteristics of Poly-Si Thin Films Prepared by IBE with a Substrate Bias System

  • Chu, Byung-Yoon (Division of Electronics and Information, Chonbuk National University) ;
  • Kim, Ho-Jin (Division of Electronics and Information, Chonbuk National University) ;
  • Yang, Sung-Chae (Division of Electronics and Information, Chonbuk National University) ;
  • Yatsui, Kiyoshi (Extreme Energy-Density Research Institute, Nagaoka University of Technology)
  • Published : 2004.08.19