Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2004.08a
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- Pages.183-183
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- 2004
Measurement of ion-induced secondary electron emission coefficient of insulator films by pulsed ion beam method
- Choi, Jae-Wook (Department of Chemical Engineering, Seoul National University) ;
- Kim, Deok-Hyeon (Department of Chemical Engineering, Seoul National University) ;
- Kim, So-Hee (Department of Chemical Engineering, Seoul National University) ;
- Lee, Ji-Hwa (Department of Chemical Engineering, Seoul National University)
- Published : 2004.08.19
Abstract
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