Measurement of ion-induced secondary electron emission coefficient of insulator films by pulsed ion beam method

  • Choi, Jae-Wook (Department of Chemical Engineering, Seoul National University) ;
  • Kim, Deok-Hyeon (Department of Chemical Engineering, Seoul National University) ;
  • Kim, So-Hee (Department of Chemical Engineering, Seoul National University) ;
  • Lee, Ji-Hwa (Department of Chemical Engineering, Seoul National University)
  • Published : 2004.08.19