Optical properties of silicon nitride films by plasma-enhanced chemical vapor deposition

• Ko, Chang-Hun (Dept. of Physics, University of Seoul) ;
• Ham, Chl-Young (Dept. of Nano Science and Technology, University of Seoul) ;
• Han, Hee-Soo (Dept. of Nano Science and Technology, University of Seoul) ;
• Lim, Yong-Hyun (Dept. of Nano Science and Technology, University of Seoul) ;
• Jun, Sung-Ho (Dept. of Nano Science and Technology, University of Seoul) ;
• Bae, Chang-Hyun (Dept. of Chemistry, Kyunghee University) ;
• Park, Kyoung-Wan (Dept. of Nano Science and Technology, University of Seoul) ;
• Han, Moon-Sup (Dept. of Physics, University of Seoul)

• Published : 2004.08.19

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