AFM lithography for fabricating nano scale structures

  • Ham, Chul-Young (Dpet. of Nano Science and Technology, University of Seoul) ;
  • Han, Hee-Soo (Dpet. of Nano Science and Technology, University of Seoul) ;
  • Jun, Sung-Ho (Dpet. of Nano Science and Technology, University of Seoul) ;
  • Ko, Chang-Hun (Dept. of Physics, University of Seoul) ;
  • Han, Moon-Sup (Dept. of Physics, University of Seoul) ;
  • Park, Kyoung-Wan (Dpet. of Nano Science and Technology, University of Seoul)
  • Published : 2004.08.19