Hydride Vapor Phase Epitay 법을 이용한 저결함 GaN 후막단결정 기판의 제조

  • Lee, Hye-Yong (Samsung Corning Co., Ltd., Gyept. of Semiconductor Science and Technology) ;
  • Kim, Jeong-Don (Samsung Corning Co., Ltd., Gyept. of Semiconductor Science and Technology) ;
  • Sin, Hyeon-Min (Samsung Corning Co., Ltd., Gyept. of Semiconductor Science and Technology) ;
  • Lee, Chang-Ho (Samsung Corning Co., Ltd., Gyept. of Semiconductor Science and Technology) ;
  • Lee, Gi-Su (Samsung Corning Co., Ltd., Gyept. of Semiconductor Science and Technology)
  • Published : 2004.08.19