Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2004.08a
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- Pages.114-114
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- 2004
Hydride Vapor Phase Epitay 법을 이용한 저결함 GaN 후막단결정 기판의 제조
- Lee, Hye-Yong (Samsung Corning Co., Ltd., Gyept. of Semiconductor Science and Technology) ;
- Kim, Jeong-Don (Samsung Corning Co., Ltd., Gyept. of Semiconductor Science and Technology) ;
- Sin, Hyeon-Min (Samsung Corning Co., Ltd., Gyept. of Semiconductor Science and Technology) ;
- Lee, Chang-Ho (Samsung Corning Co., Ltd., Gyept. of Semiconductor Science and Technology) ;
- Lee, Gi-Su (Samsung Corning Co., Ltd., Gyept. of Semiconductor Science and Technology)
- Published : 2004.08.19
Abstract
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