Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2004.08a
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- Pages.108-108
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- 2004
저온 물리 흡착된 희가스의 ESD 실험장치
- Hong, Seung-Su ;
- Im, In-Tae ;
- Jeong, Gwang-Hwa ;
- Shoaib, M. (PVS) ;
- Arakawa, I. (Gakushuin University)
- Published : 2004.08.19
Abstract
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