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The Korean Vacuum Society
http://www.kvs.or.kr
Proceedings of the Korean Vacuum Society Conference
(한국진공학회:학술대회논문집)
2004.08a
/
Pages.77-77
/
2004
The Korean Vacuum Society (한국진공학회)
Development of Etching Chambers with ACP sources
Kim, Nam-Hun
(Adaptive Plasma Technology Corp./ Chung-Ang Univ.)
Published : 2004.08.19
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