Visible photoluminescence from nanocrystal-Si in SiNx thin films grown by ion beam sputtering

  • Yang, Moon-Seung (Dept. of physics, Korea Advanced Institute of Science and Technology (KAIST)) ;
  • Shin, Jung-H. (Dept. of physics, Korea Advanced Institute of Science and Technology (KAIST)) ;
  • Kim, Kyung-Joong (Nano Surface Group, Korea Research Institute of standards and Science (KRISS)) ;
  • Moon, Dae-Won (Nano Surface Group, Korea Research Institute of standards and Science (KRISS))
  • Published : 2004.02.11