한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2004년도 제26회 학술발표회 초록집
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- Pages.121-121
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- 2004
Plasma Source Ion Implantation using High Power Pulsed RF Plasma
- Han, Seung-Hee (Advanced Analysis Center, Korea Institute of Science and Technology) ;
- Lee, Yeon-Hee (Advanced Analysis Center, Korea Institute of Science and Technology) ;
- Kim, Young-Woo (Department of Physics, Hanyang University-Ansan) ;
- Kim, Young-Soo (Department of Chemistry, Korea University) ;
- Chun, Hye-Jin (Department of Chemistry, Korea University) ;
- Lee, Jung-Hye (Advanced Analysis Center, Korea Institute of Science and Technology) ;
- Kwon, Moon-Hee (Department of Chemistry, Kyunghee University)
- 발행 : 2004.02.11