Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2004.02a
- /
- Pages.121-121
- /
- 2004
Plasma Source Ion Implantation using High Power Pulsed RF Plasma
- Han, Seung-Hee (Advanced Analysis Center, Korea Institute of Science and Technology) ;
- Lee, Yeon-Hee (Advanced Analysis Center, Korea Institute of Science and Technology) ;
- Kim, Young-Woo (Department of Physics, Hanyang University-Ansan) ;
- Kim, Young-Soo (Department of Chemistry, Korea University) ;
- Chun, Hye-Jin (Department of Chemistry, Korea University) ;
- Lee, Jung-Hye (Advanced Analysis Center, Korea Institute of Science and Technology) ;
- Kwon, Moon-Hee (Department of Chemistry, Kyunghee University)
- Published : 2004.02.11
Abstract
Keywords