제어로봇시스템학회:학술대회논문집

Institute of Control, Robotics and Systems (제어로봇시스템학회)
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Feedback Control for Expanding Range and Improving Linearity of Microaccelerometers

  • Park, Yong-Hwa (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Shim, Joon-Sub (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Park, Sang-Jun (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Kwak, Dong-Hun (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Ko, Hyoung-Ho (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Song, Tae-Yong (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Huh, Kun-Soo (School of Mechanical Engineering, Hanyang University) ;
  • Park, Jahang-Hyon (School of Mechanical Engineering, Hanyang University) ;
  • Cho, Dong-Il (School of Electrical Engineering and Computer Science, Seoul National University)
  • Published : 2004.08.25
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Abstract

This paper presents a feedback-controlled, MEMS-fabricated microaccelerometer (${\mu}$XL). The ${\mu}$XL has received much commercial attraction, but its performance is generally limited. To improve the open-loop performance, a feedback controller is designed and experimentally evaluated. The feedback controller is applied to the x/y-axis ${\mu}$XL fabricated by sacrificial bulk micromachining (SBM) process. Even though the resolution of the closed-loop system is slightly worse than open-loop system, the bandwidth, linearity, and bias stability are significantly improved. The noise equivalent resolution of open-loop system is 0.615 mg and that of closed-loop system is 0.864 mg. The bandwidths of open-loop and closed-loop system are over 100 Hz. The input range, non-linearity and bias stability are improved from ${\pm}$10 g to ${\pm}$18 g, from 11.1 %FSO to 0.86 %FSO, and from 0.221 mg to 0.128 mg by feedback control, respectively

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