제어로봇시스템학회:학술대회논문집
- 2004.08a
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- Pages.1706-1710
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- 2004
Feedback Control for Expanding Range and Improving Linearity of Microaccelerometers
- Park, Yong-Hwa (School of Electrical Engineering and Computer Science, Seoul National University) ;
- Shim, Joon-Sub (School of Electrical Engineering and Computer Science, Seoul National University) ;
- Park, Sang-Jun (School of Electrical Engineering and Computer Science, Seoul National University) ;
- Kwak, Dong-Hun (School of Electrical Engineering and Computer Science, Seoul National University) ;
- Ko, Hyoung-Ho (School of Electrical Engineering and Computer Science, Seoul National University) ;
- Song, Tae-Yong (School of Electrical Engineering and Computer Science, Seoul National University) ;
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Huh, Kun-Soo
(School of Mechanical Engineering, Hanyang University) ;
- Park, Jahang-Hyon (School of Mechanical Engineering, Hanyang University) ;
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Cho, Dong-Il
(School of Electrical Engineering and Computer Science, Seoul National University)
- Published : 2004.08.25
Abstract
This paper presents a feedback-controlled, MEMS-fabricated microaccelerometer (