Optimal Cylindrical Capacitive Sensor(CCS) taking into account the Circumferential Gaps between Sensor Electrodes

센서 전극 사이의 간극을 고려한 최적의 정전용량 센서

CCS was developed and applied to rotating machines because of accurately measuring the spindle error motion without significant efforts. However, researches on the CCS have been focused on ideal cases where circumferential gaps were ignored. This paper presents the effects of circumferential gaps and proposes an optimal CCS considering the circumferential gaps. First, electrostatic analysis of the CCS that includes the circumferential gaps is performed using the FEM, and an additional capacitance due to the circumferential gap can be approximated as an equivalent extended sensor length. Second, a mathematical model of the CCS considering the circumferential gaps is derived, and the optimal CCS is determined through minimization of the weighted error amplification factor. Finally, two CCSs, both considering and ignoring the circumferential gaps, are built, and the effectiveness of the optimal design is verified through simulation and experiment.