Proceedings of the KSME Conference (대한기계학회:학술대회논문집)

The Korean Society of Mechanical Engineers (대한기계학회)
권호 표지

Injection Molded Nano Scale Pattern

사출 성형 공정을 이용한 나노급 패턴 제작

  • 유영은 (한국기계연구원, 지능형정밀기계연구부) ;
  • 서영호 (한국기계연구원, 지능형정밀기계연구부) ;
  • 최두선 (한국기계연구원, 지능형정밀기계연구부) ;
  • 이준형 (한국기계연구원, 지능형정밀기계연구부) ;
  • 제태진 (한국기계연구원, 지능형정밀기계연구부) ;
  • 황경현 (한국기계연구원, 지능형정밀기계연구부)
  • Published : 2004.04.28
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Abstract

A new method is proposed to fabricate a reusable qualtz master with order of 100 nm dot pattern on its surface. Some fabrication conditions such as dose are investigated to find optimal condition. This reusable qualtz master is used directly as a stamper to injection mold the dot patterns. Polycarbonate and Polyoxymethylene are used as molding materials and the effect of the mold temperature is also investigated to see the moldabilty of the injection molding for very fine dot features.

Keywords