A Study on Nano-Indentation for Ductile Materials Using FEA

유한요소해석을 이용한 연성재료의 나노인덴테이션에 관한 연구

Nano-indentation is used for measuring mechanical properties of thin films such as elastic modulus and hardness. For ductile materials, pile-up around the indenter causes the calculation of inaccurate projected contact area. This phenomenon was found by measurement of indentation shape using an atomic force microscope. In present study finite element analysis of nano-indentation was performed to compensate the effects of pile-up on the contact area. The result of finite element analysis was compared with that of nano-indentation for a ductile material. The analysis has demonstrated that the true contact area is greater than that calculated by nano-indentation. It is verified that the consideration of the effects of pile-up in nanoindentation for ductile materials using the finite element method is reasonable.