Proceedings of the SAREK Conference (대한설비공학회:학술대회논문집)
- 2004.06a
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- Pages.169-169
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- 2004
Numerical Analysis for Thermal and Flow Field around Substrate of Thermal CVD Chamber with Variation of Grown Temperature
Thermal CVD 반응로 내부의 성장 온도 변화에 따른 기판 주위에서의 열$\cdot$ 유동장에 대한 수치해석적 연구
- Kim Yun Ho (Department of Mechanical & Information Engineering, University of Seoul) ;
- Lee Young Seok (Department of Chemical Engineering, Sunchon National University) ;
- Rhee Gwang Hoon (Department of Mechanical & Information Engineering, University of Seoul)
- Published : 2004.06.01
Abstract
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