전력전자학회:학술대회논문집 (Proceedings of the KIPE Conference)
- 전력전자학회 2004년도 전력전자학술대회 논문집(2)
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- Pages.878-882
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- 2004
광학식 엔코더의 회절격자를 이용한 고정도 엔코더 개발
A Study on precision encoder design using diffraction grating
- Hong J. P. (Pukyong national univ.) ;
- Son J. K. (KPTI) ;
- Won T. H. (Dongeui institute of technology) ;
- Kwon S. J. (Pukyong national univ.) ;
- Hong S. I. (Pukyong national univ.) ;
- Kim J. D. (Tongmyong college)
- 발행 : 2004.07.01
초록
Position controls are very important in semiconductor manufacturing devices, machine tools precision measuring instruments, etc. In this paper, a novel encoder of digital and analog hybrid type is proposed. It is shown that from this experiment a high-resolution angle measurement device can be designed by a low cost incremental encoder.
키워드