Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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A study on the properties of AZO(ZnO:Al) thin film with a variety of targets

타겟 종류에 따른 AZO(ZnO:Al) 박막 특성에 관한 연구

  • 김현웅 (경원대학교 전기정보공학과) ;
  • 금민종 (경원대학교 전기정보공학과) ;
  • 손인환 (신성대학 디지털전기계열) ;
  • 김경환 (경원대학교 전기정보공학과)
  • Published : 2004.05.06
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Abstract

AZO(ZnO:Al) thin film were prepared by FTS(Facing Target Sputtering) system. Change the sputtering conditions, AZO thin film deposited the lower resistivity(<$10-4{\Omega}cm$) so it can use to be a display application electrode. In this study, the electrical and crystallographic effects of target type have been investigated. The crystal structure was studied by XRD and the resistivity of AZO thin film was obtained by the four-point probe.

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