한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2004년도 춘계학술대회 논문집 디스플레이 광소자분야
- /
- Pages.90-93
- /
- 2004
태양전지를 위한 다양한 표면 패시베이션(passivation) 막들의 연구
Investigation of varied suface passivation layers for solar cells
- Lee, Ji-Youn (Photovoltaics R&D Center, Sungjin Semitech Co.) ;
-
Lee, Soo-Hong
(Strategic Research Energy Center, Dept. of Electronics Engineering, Sejong University)
- 발행 : 2004.05.06
초록
In this work, we have used different techniques for the surface passivation: conventional thermal oxidation (CTO), rapid thermal oxidation (RTO), and plasma-enhanced chemical vapour deposition (PECVD). The surface passivation qualities of eight different single and combined double layer have been investigated both on the phosphorus non-diffused p-type FZ silicon and on phosphorus diffused emitter of 100