Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2004.05c
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- Pages.43-46
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- 2004
The Analysis of Electron Energy Distribution Function in $CH_4$ Gas
$CH_4$ 기체의 전자에너지 분포함수 해석
- Kim, Sang-Nam (Incheon city collage) ;
- Seong, Nak-Jin (Incheon city collage)
- Published : 2004.05.28
Abstract
This paper describes the information for quantitative simulation of weal이y ionized plasma. We must grasp the meaning of the plasma state condition to utilize engineering application and to understand materials of plasma state. Using quantitative simulations of weakly ionized plasma, we can analyze gas characteristic. In this paper, the electron transport characteristic in
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