Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2004.04b
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- Pages.153-156
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- 2004
The Dielectric Properties of the PZT Heterolayered Thin Films Prepared by RF Sputtering Method
RF 스퍼터링법으로 제조한 PZT 이종층 박막의 유전 특성
- Nam, Sung-Pill (Kwangwoon University) ;
- Lee, Sang-Chul (Kwangwoon University) ;
- Bae, Seon-Gi (Inchon University) ;
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Lee, Young-Hie
(Kwangwoon University)
- Published : 2004.04.24
Abstract
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