한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2004년도 춘계학술대회 논문집 반도체 재료 센서 박막재료 전자세라믹스
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- Pages.125-128
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- 2004
초고온 MEMS용 SiCN 미세구조물 제조
Fabrication of SiCN Microstructures for Super-Temperature MEMS applications
- Woo, Hyung-Soon (Dongseo Univ) ;
- Kim, Gue-Hyun (Dongseo Univ) ;
- Noh, Sang-Su (Technical Research Institute, Daeyang Electric Co., LTD) ;
- Chung, Gwiy-Sang (Dongseo Univ)
- 발행 : 2004.04.24
초록
In this paper, a novel processing technique for fabrication of high-temperature MEMS based on polymer-derived SiCN microstructures is described. PDMS molds are fabricated on SU-8 photoresist using standard UV-photolithographic processes. Liquid precursors are injected into the PDMS mold. And then, the resulting solid polymer structures are crosslinked under isostatic pressure, and pyrolyzed to form a ceramic capable of withstanding over