한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2004년도 춘계학술대회 논문집 반도체 재료 센서 박막재료 전자세라믹스
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- Pages.22-25
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- 2004
유도결합 플라즈마를 이용한 BST 박막의 식각 특성 연구
A study on the etch characteristics of BST thin films using inductively coupled plasma
- Kim, Gwan-Ha (ChungAng Uni.) ;
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Kim, Kyoung-Tae
(ChungAng Uni.) ;
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Kim, Chang-Il
(ChungAng Uni.) ;
- Kim, Tae-Hyung (Ansan College of Technology) ;
- Lee, Chul-In (YeoJoo Institute of Technology)
- 발행 : 2004.04.24
초록
In this study, BST thin films were etched with inductively coupled