한국정보디스플레이학회:학술대회논문집
- 한국정보디스플레이학회 2004년도 Asia Display / IMID 04
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- Pages.1019-1022
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- 2004
Advanced P-Channel Poly-Si TFTs for SOG
- Park, Seong-Jin (Advanced Display Research Center, Kyung Hee University) ;
- Kang, Sang-Hoon (Advanced Display Research Center, Kyung Hee University) ;
- Ku, Yu-Mi (Advanced Display Research Center, Kyung Hee University) ;
- Choi, Jong-Hyun (Advanced Display Research Center, Kyung Hee University) ;
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Jang, Jin
(Advanced Display Research Center, Kyung Hee University)
- 발행 : 2004.08.23
초록
High performance p-ch poly-Si TFTs with excellent stability were developed. By using a frequency doubled DPSS CW laser, the a-Si on glass could be crystallized into one dimensional single crystalline silicon named as a sequential lateral crystallization (SLC) region. We fabricated p-ch TFTs on SLC region and the typical characteristic values of the TFTs were
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