한국정보디스플레이학회:학술대회논문집
- 2004.08a
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- Pages.973-974
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- 2004
Flexible Plastic ITO Substrates for OLED using Vapor-Polymerized Parylene C
- Lee, Kyu-Chul (Department of Chemical Engineering, Sungkyunkwan University) ;
- Choi, Soo-Hyun (Department of Chemical Engineering, Sungkyunkwan University) ;
- Cho, Sung-M (Department of Chemical Engineering, Sungkyunkwan University) ;
- Choi, Kang-Yong (Jinwoo Engineering Co. LTD.) ;
- Lee, Jung-Kyu (Jinwoo Engineering Co. LTD.)
- Published : 2004.08.23
Abstract
We report the fabrication of flexible plastic ITO substrates and the measurement of oxidant permeation through the substrates. The plastic ITO substrates are composed of multiple organic and inorganic thin films. The organic thin films are deposited by vapor polymerization and the inorganic films are deposited by ion beam sputtering. In order to estimate the oxidant permeation rate, the pure Ca film is formed on the substrates and the amount of CaO produced by the oxidation of Ca is measured.
Keywords