한국정보디스플레이학회:학술대회논문집
- 2004.08a
- /
- Pages.957-961
- /
- 2004
Laser crystallization of Si film for poly-Si thin film transistor on plastic substrates
- Kwon, Jang-Yeon (Samsung Advanced Institute of Technology (SAIT)) ;
- Cho, Hans-S (Samsung Advanced Institute of Technology (SAIT)) ;
- Kim, Do-Young (Samsung Advanced Institute of Technology (SAIT)) ;
- Park, Kyung-Bae (Samsung Advanced Institute of Technology (SAIT)) ;
- Jung, Ji-Sim (Samsung Advanced Institute of Technology (SAIT)) ;
- Park, Young-Soo (Samsung Advanced Institute of Technology (SAIT)) ;
- Lee, Min-Chul (Seoul National University) ;
- Han, Min-Koo (Seoul National University) ;
- Noguchi, Takashi (Samsung Advanced Institute of Technology (SAIT), Sungkyunkwan University)
- Published : 2004.08.23
Abstract
In order to realize high performance thin film transistor (TFT) on plastic substrate, Si film was deposited on plastic substrate at 170
Keywords