한국정보디스플레이학회:학술대회논문집
- 한국정보디스플레이학회 2004년도 Asia Display / IMID 04
- /
- Pages.315-318
- /
- 2004
Microstructural improvement in polycrystalline Si films by crystallizing with vapor transport of Al/Ni chlorides
- Eom, Ji-Hye (Dept. of Materials Science and Engineering, Korea Advanced Institute of Science and Technology) ;
-
Lee, Kye-Ung
(Dept. of Materials Science and Engineering, Korea Advanced Institute of Science and Technology) ;
- Jun, Young-Kwon (Hesed Technology Co., Ltd) ;
-
Ahn, Byung-Tae
(Dept. of Materials Science and Engineering, Korea Advanced Institute of Science and Technology)
- 발행 : 2004.08.23
초록
We developed a vapor induced crystallization (VIC) process for the first time to obtain high quality polycrystalline Si films by sublimating the mixture of
키워드