한국정보디스플레이학회:학술대회논문집
- 한국정보디스플레이학회 2004년도 Asia Display / IMID 04
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- Pages.124-128
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- 2004
LTPS Technology in ERSO
- Liu, David N. (Electronics Research and Service Organization Industrial Technology Research Institute) ;
- Yeh, Yung-Hui (Electronics Research and Service Organization Industrial Technology Research Institute)
- 발행 : 2004.08.23
초록
A Poly-Si and a ITO films with surface roughness 1.8 nm and 0.5 nm of root mean square (
키워드