한국정보디스플레이학회:학술대회논문집

한국정보디스플레이학회 (The Korean Infomation Display Society)
권호 표지

Transparent MgO films deposited on glass substrates by e-beam evaporation for AC plasma display panels

  • Kumar, Sudheer (PDP Lab, Samtel Color Limited) ;
  • Premkumar, S. (PDP Lab, Samtel Color Limited) ;
  • Sarma, K.R. (PDP Lab, Samtel Color Limited) ;
  • Kumar, Satyendra (Samtel Centre for Display Technologies)
  • 발행 : 2004.08.23
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초록

Transparent MgO thin films were deposited on glass substrates by electron beam evaporation of MgO (99.99%) under $O_2$ atmosphere at 150-250 $^{\circ}C$. These films were characterized for their useful properties such as thickness, transmission, and refractive index using ultraviolet / visible (UV/VIS) spectrophotometer, scanning electron microscopy (SEM), and Spectroscopic Ellipsometry. The thickness of MgO films were measured by alpha step instrument and found to be 600 nm to 1000 nm and are meeting the stoichiometry. The transmission spectrum of these films shows transmittance values ${\sim}$92%..

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