대한전자공학회:학술대회논문집 (Proceedings of the IEEK Conference)
- 대한전자공학회 2004년도 학술대회지
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- Pages.628-635
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- 2004
Study on the characteristic of high precision thin film resistor
- Park Hyun Sik (Dept of Electronic Engineering, Hankyong Electronic Technology Institute, Hankyong National University) ;
- Yu Yun Seop (Dept of Information and Control Engineering, Hankyong Electronic Technology Institute, Hankyong National University)
- 발행 : 2004.08.01
초록
The characteristic of thin film resistor with low TCR( temperature coefficient of resistance ) and high precision are studied. The thin film resistor for 1/4W was fabricated and characteristic of these resistors was investigated. The fabricated device had the thickness of