Proceedings of the IEEK Conference (대한전자공학회:학술대회논문집)
- 2004.08c
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- Pages.628-635
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- 2004
Study on the characteristic of high precision thin film resistor
- Park Hyun Sik (Dept of Electronic Engineering, Hankyong Electronic Technology Institute, Hankyong National University) ;
- Yu Yun Seop (Dept of Information and Control Engineering, Hankyong Electronic Technology Institute, Hankyong National University)
- Published : 2004.08.01
Abstract
The characteristic of thin film resistor with low TCR( temperature coefficient of resistance ) and high precision are studied. The thin film resistor for 1/4W was fabricated and characteristic of these resistors was investigated. The fabricated device had the thickness of