한국정보통신설비학회:학술대회논문집

Korea Institute of Information and Telecommunication Facilities Engineering (한국정보통신설비학회)
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A Micromachined Tunable Bandpass Filter Using RF MEMS Switch

RF MEMS 스위치를 이용한 주파수 가변 대역 통과 필터

  • Kim Jong-Man (School of Electrical and Computer Science, Seoul National University) ;
  • Park Jae-Hyoung (LG Electronics Institute of Technology) ;
  • Kim Jung-Mu (School of Electrical and Computer Science, Seoul National University) ;
  • Lee Sang-Hyo (School of Electrical and Computer Science, Seoul National University) ;
  • Baek Chang-Wook (School of Electrical and Computer Science, Seoul National University) ;
  • Kwon Young-Woo (School of Electrical and Computer Science, Seoul National University) ;
  • Kim Yong-Kweon (School of Electrical and Computer Science, Seoul National University)
  • 김종만 (서울대학교 전기컴퓨터공학부) ;
  • 박재형 (LG 전자기술원) ;
  • 김정무 (서울대학교 전기컴퓨터공학부) ;
  • 이상효 (서울대학교 전기컴퓨터공학부) ;
  • 백창욱 (서울대학교 전기컴퓨터공학부) ;
  • 권영우 (서울대학교 전기컴퓨터공학부) ;
  • 김용권 (서울대학교 전기컴퓨터공학부)
  • Published : 2004.08.01
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Abstract

In this paper, a novel tunable bandpass filter using tunable series inductors and MEMS switches for wireless LAN applications was proposed. The proposed tunable filter was fabricated using a micromachining technology and performances of the fabricated filter were estimated. The filter consists of spiral inductors, MIM capacitors and direct-contact type MEMS switches, and its frequency tunability is achieved by changing the inductance that is induced by ON/OFF actuations of the MEMS switches. The actuation voltage of the MEMS switches was 58 V, and the measured center frequencies were 2.55 GHz and 5.1 GHz, respectively. The passband insertion loss and 3-dB bandwidth were 4.2 dB and 22.5 % at 2.55 GHz, and 5.2 dB and 23.5 % at 5.1 GHz, respectively.

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